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1 article(s) from Gerthsen, Dagmar

Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping

Lukas Grünewald,
Dagmar Gerthsen and
Simon Hettler

Beilstein J. Nanotechnol. 2019, 10, 1290–1302, doi:10.3762/bjnano.10.128

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Figure 1: Samples after optical lithography and etching. (a) Scheme of side view of a single membrane. The sk...

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Figure 2: The fabrication steps to fabricate aC thin films are schematically shown for the two applied method...

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Figure 3: SEM images of (a) FIB-prepared and (b) floated aC thin films reveal a smoother surface for the latt...

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Figure 4: SEM images after structuring the pattern according to Equation 3 with k_ρ = 10 µm⁻¹ for (a) a FIB-prepared and...

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Figure 5: Top-view SEM images of (a) a sinusoidal and (b) a saw-tooth-shaped holographic PM for the generatio...

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Figure 6: TEM images in LM mode of a PM placed in the object plane are shown in (a) to (c). (a) The image of ...

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Figure 7: (a) Intensity in the center of a BB I_C plotted as a function of the C2 lens current. The curve is r...

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Figure 8: (a) Generated VBs in the object plane of a Philips CM200 for the sinusoidal and saw-tooth pattern, ...

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Full Research Paper

Published 25 Jun 2019

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